Radiofrequency magnetron sputtering Nanostructures Silicon Multilayers Rare-earth ions Refractive index Pulsed laser deposition Structural properties Crystal structure SiC ADE-FDTD RF magnetron sputtering Waveguides Couches minces AFM Terbium GENOMIQUE Silicon photonics Fluorescence Magnetron sputtering Nanostructured materials Microstructure physique CoMoS Cerium Cathodoluminescence IR spectroscopy Hafnium silicates FTIR Copper Nanostructure Computational electromagnetic methods XRD Electron paramagnetic resonance Rare earths Nanoparticules Guide d'onde Waveguide Oxygen vacancies Photovoltaic Conductivity Optical amplifiers Silicium Feature erasure Epitaxy Liposomes Nanoparticles Matériaux hybrides Pulvérisation magnétron radiofréquence Infrared absorption Reactive magnetron sputtering Silicon nitride Terres rares Couches minces semi-conductrices PZT Atom probe tomography Semiconductors Hafnium silicate Si-rich silicon oxide Optical properties Erbium Doping Electroluminescence Lifetime Oxide materials High-k dielectrics MoS2 Films Quantum-well Down-conversion Nanostructuring Thin films M-lines Citric acid Pulvérisation cathodique Raman scattering Friction Microstructure physics Silicon nanocrystals CO adsorption Laser pyrolysis Hybrid materials Energy transfer HR STEM-HAADF Neodymium Grazing incidence X-ray diffraction Phase transition Thin film Photoluminescence Luminescence Microstructure Oxides Raman Al2O3 Si nanocluster Silicon nanoclusters Rare earth Irradiation Sputtering Oxide interface Hillocks